A MEMS Based Large Travel Range Linear Actuator with a Good Minimum Step Size to Be Used in Mirror Shape Correction Applications
In this paper, a high-precision thermal linear micro actuator (LMA) with a large travel range is analyzed, simulated and presented. Physical functions can be performed by MEMS thanks to micro-actuators. The operation of various types of micro-actuators in many applications has been successful. The...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2024-02-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/february_2024/Vol_264/p_3324.pdf |