A MEMS Based Large Travel Range Linear Actuator with a Good Minimum Step Size to Be Used in Mirror Shape Correction Applications
In this paper, a high-precision thermal linear micro actuator (LMA) with a large travel range is analyzed, simulated and presented. Physical functions can be performed by MEMS thanks to micro-actuators. The operation of various types of micro-actuators in many applications has been successful. The...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2024-02-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/february_2024/Vol_264/p_3324.pdf |
| Summary: | In this paper, a high-precision thermal linear micro actuator (LMA) with a large travel range is
analyzed, simulated and presented. Physical functions can be performed by MEMS thanks to micro-actuators.
The operation of various types of micro-actuators in many applications has been successful. There are two
perspectives to categorize micro-actuators; one focused on driving forces and the other on mechanisms. Electric,
magnetic, and flow fields can be utilized to generate force in the space between stationary and moving parts.
The intrinsic actuation capabilities of materials like piezoelectric, magnetostrictive, and photo stretched
materials also can be used in them. Changes in shape or volume caused by thermal expansion and phase
transformations; such as the shape-memory effect and bubble formation are another important ways to reach a
deformation in these types of actuators. In our proposed LMA, electro-thermal technique has been selected. The
main components of the electro-thermal LMA proposed are substrate, slider, stopper, and forks. The slider is a
long rectangle beam placed on a rail so that can move bidirectional, either up-ward or down-ward. A complex
interesting technique, by using the stoppers and forks, results bidirectional movement of the slider. The stopper
consists of arrayed electro-thermal chevrons (EC) and springy clutch. By applying a DC voltage of 1.5 V to the
Red fork's ECs arrays, the minimum step size approximately 20 μm is achieved. Repeating steps sequentially
generate a travel range of about 2 mm. For all simulations, the ANSYS software has been used. The LMA has
the ability to displace heavy loads linearly and accurately. Minimum step size and large travel range of the LMA
proposed make it useful to be used for Mirror Shape Correction application. |
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| ISSN: | 2306-8515 1726-5479 |