Structural Characterization of Movpe Grown Algan/Gan for Hemt Formation
Results on structural, compositional, optical and electrical characterization of MOVPE grown AlGaN/GaN heterostructures with focus on understanding how the AlN buffer synthesis affects the top films are reported. The study demonstrates very good correlation between different methods providing a plat...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2018-06-01
|
| Series: | Reviews on Advanced Materials Science |
| Online Access: | https://doi.org/10.1515/rams-2018-0049 |