Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation. Spatially shaped fs laser-assisted chemical etchi...

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Bibliographic Details
Main Authors: Jianping Yu, Jian Xu, Aodong Zhang, Yunpeng Song, Jia Qi, Qiaonan Dong, Jianfang Chen, Zhaoxiang Liu, Wei Chen, Ya Cheng
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Sensors
Subjects:
femtosecond laser microfabrication
carbon dioxide laser irradiation
glass microchannels
laser-assisted chemical etching
optofluidic waveguides
spot-size converters
Online Access:https://www.mdpi.com/1424-8220/22/23/9449

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https://www.mdpi.com/1424-8220/22/23/9449

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