Enhancing the specific capacitance of a porous silicon-based capacitor by embedding graphene combined with three-dimensional electrochemical etching
A porous silicon-based capacitive structure with high specific capacitance is fabricated by three-dimensional electrochemical etching. As well as conventional planar electrochemical etching in two dimensions on the surface of a silicon chip, the lateral side walls of trenches engraved by a laser bea...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-09-01
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| Series: | Electrochemistry Communications |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S1388248123001297 |