Effect of Silicon Wafer Surface Stains on Copper-Assisted Chemical Etching

Effect of Silicon Wafer Surface Stains on Copper-Assisted Chemical Etching

Silicon wafer slicing is a crucial process during solar cell fabrication, but it often stains the silicon wafer surface. Thus, this work systematically investigated the composition, source, and cleaning method of typical white spot stains on silicon wafer surfaces. The EDS and XPS results showed tha...

Full description

Bibliographic Details
Main Authors: Liang Ma, Xiuhua Chen, Chenggui Tang, Shaoyuan Li, Fengshuo Xi, Huayan Lan, Wenhui Ma, Yuanchih Chang
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Metals
Subjects:
silicon wafer
white spot stains
silicon wafer texturization
silicon wafer cleaning
Online Access:https://www.mdpi.com/2075-4701/13/4/742

Internet

https://www.mdpi.com/2075-4701/13/4/742

Similar Items