Similarity-based scaling networks for capacitive radio frequency discharge plasmas

Similarity-based scaling networks for capacitive radio frequency discharge plasmas

We demonstrate similarity-based scaling networks for capacitive radio frequency (RF) plasmas, which extensively correlate discharge characteristics under varied conditions, incorporating the transition from original to similarity states. Based on fully kinetic particle-in-cell simulations, similar R...

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Bibliographic Details
Main Authors: Huihui Wang, Dong Yang, Bocong Zheng, John P. Verboncoeur, Yangyang Fu
Format: Article
Language:English
Published: AIP Publishing LLC 2023-09-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0162549

Internet

http://dx.doi.org/10.1063/5.0162549

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