Similarity-based scaling networks for capacitive radio frequency discharge plasmas
We demonstrate similarity-based scaling networks for capacitive radio frequency (RF) plasmas, which extensively correlate discharge characteristics under varied conditions, incorporating the transition from original to similarity states. Based on fully kinetic particle-in-cell simulations, similar R...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-09-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0162549 |
| _version_ | 1797663151415623680 |
|---|---|
| author | Huihui Wang Dong Yang Bocong Zheng John P. Verboncoeur Yangyang Fu |
| author_facet | Huihui Wang Dong Yang Bocong Zheng John P. Verboncoeur Yangyang Fu |
| author_sort | Huihui Wang |
| collection | DOAJ |
| description | We demonstrate similarity-based scaling networks for capacitive radio frequency (RF) plasmas, which extensively correlate discharge characteristics under varied conditions, incorporating the transition from original to similarity states. Based on fully kinetic particle-in-cell simulations, similar RF discharges in argon are demonstrated with three external control parameters (gas pressure, gap distance, and driving frequency) simultaneously tuned. A complete set of scaling pathways regarding fundamental discharge parameters is obtained, from which each plasma state finds its neighboring node with only one control parameter tuned. The results from this study provide a promising strategy for plasma multi-parameter mapping, enabling effective cross-comparisons, prediction, and manipulation of RF discharge plasmas. |
| first_indexed | 2024-03-11T19:10:29Z |
| format | Article |
| id | doaj.art-ad9a29000dec47bb8599d729882cc0fc |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-03-11T19:10:29Z |
| publishDate | 2023-09-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-ad9a29000dec47bb8599d729882cc0fc2023-10-09T20:09:21ZengAIP Publishing LLCAIP Advances2158-32262023-09-01139095001095001-810.1063/5.0162549Similarity-based scaling networks for capacitive radio frequency discharge plasmasHuihui Wang0Dong Yang1Bocong Zheng2John P. Verboncoeur3Yangyang Fu4Department of Chemical Engineering, Tsinghua University, Beijing 100084, ChinaDepartment of Electrical Engineering, Tsinghua University, Beijing 100084, ChinaSchool of Physics, Beijing Institute of Technology, Beijing 100081, ChinaDepartment of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USADepartment of Electrical Engineering, Tsinghua University, Beijing 100084, ChinaWe demonstrate similarity-based scaling networks for capacitive radio frequency (RF) plasmas, which extensively correlate discharge characteristics under varied conditions, incorporating the transition from original to similarity states. Based on fully kinetic particle-in-cell simulations, similar RF discharges in argon are demonstrated with three external control parameters (gas pressure, gap distance, and driving frequency) simultaneously tuned. A complete set of scaling pathways regarding fundamental discharge parameters is obtained, from which each plasma state finds its neighboring node with only one control parameter tuned. The results from this study provide a promising strategy for plasma multi-parameter mapping, enabling effective cross-comparisons, prediction, and manipulation of RF discharge plasmas.http://dx.doi.org/10.1063/5.0162549 |
| spellingShingle | Huihui Wang Dong Yang Bocong Zheng John P. Verboncoeur Yangyang Fu Similarity-based scaling networks for capacitive radio frequency discharge plasmas AIP Advances |
| title | Similarity-based scaling networks for capacitive radio frequency discharge plasmas |
| title_full | Similarity-based scaling networks for capacitive radio frequency discharge plasmas |
| title_fullStr | Similarity-based scaling networks for capacitive radio frequency discharge plasmas |
| title_full_unstemmed | Similarity-based scaling networks for capacitive radio frequency discharge plasmas |
| title_short | Similarity-based scaling networks for capacitive radio frequency discharge plasmas |
| title_sort | similarity based scaling networks for capacitive radio frequency discharge plasmas |
| url | http://dx.doi.org/10.1063/5.0162549 |
| work_keys_str_mv | AT huihuiwang similaritybasedscalingnetworksforcapacitiveradiofrequencydischargeplasmas AT dongyang similaritybasedscalingnetworksforcapacitiveradiofrequencydischargeplasmas AT bocongzheng similaritybasedscalingnetworksforcapacitiveradiofrequencydischargeplasmas AT johnpverboncoeur similaritybasedscalingnetworksforcapacitiveradiofrequencydischargeplasmas AT yangyangfu similaritybasedscalingnetworksforcapacitiveradiofrequencydischargeplasmas |