Similarity-based scaling networks for capacitive radio frequency discharge plasmas
We demonstrate similarity-based scaling networks for capacitive radio frequency (RF) plasmas, which extensively correlate discharge characteristics under varied conditions, incorporating the transition from original to similarity states. Based on fully kinetic particle-in-cell simulations, similar R...
Main Authors: | Huihui Wang, Dong Yang, Bocong Zheng, John P. Verboncoeur, Yangyang Fu |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2023-09-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0162549 |
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