The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO2 Films Deposited by Atomic Layer Deposition

The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO2 Films Deposited by Atomic Layer Deposition

Analyte sensitivity for gas sensors based on semiconducting metal oxides should be highly dependent on the film thickness, particularly when that thickness is on the order of the Debye length. This thickness dependence has previously been demonstrated for SnO2 and inferred for TiO2. In this paper, T...

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Bibliographic Details
Main Authors: Rachel L. Wilson, Cristian Eugen Simion, Christopher S. Blackman, Claire J. Carmalt, Adelina Stanoiu, Francesco Di Maggio, James A. Covington
Format: Article
Language:English
Published: MDPI AG 2018-03-01
Series:Sensors
Subjects:
gas sensing
sensors
ALD
TiO2
titanium isopropoxide
thin films
debye length
Online Access:http://www.mdpi.com/1424-8220/18/3/735

Internet

http://www.mdpi.com/1424-8220/18/3/735

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