Demonstration of avalanche capability in 800 V vertical GaN-on-silicon diodes
High-quality pseudo-vertical p–n diodes using a GaN-on-silicon heterostructure are reported. An optimized fabrication process including a beveled deep mesa as edge termination and reduced ohmic contact resistances enabled high on-state current density and low on-resistance. A uniform breakdown volta...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2023-01-01
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Series: | Applied Physics Express |
Subjects: | |
Online Access: | https://doi.org/10.35848/1882-0786/ad106c |