Evolution of Cu-In Catalyst Nanoparticles under Hydrogen Plasma Treatment and Silicon Nanowire Growth Conditions

Evolution of Cu-In Catalyst Nanoparticles under Hydrogen Plasma Treatment and Silicon Nanowire Growth Conditions

We report silicon nanowire (SiNW) growth with a novel Cu-In bimetallic catalyst using a plasma-enhanced chemical vapor deposition (PECVD) method. We study the structure of the catalyst nanoparticles (NPs) throughout a two-step process that includes a hydrogen plasma pre-treatment at 200 °C and the S...

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Bibliographic Details
Main Authors: Weixi Wang, Éric Ngo, Pavel Bulkin, Zhengyu Zhang, Martin Foldyna, Pere Roca i Cabarrocas, Erik V. Johnson, Jean-Luc Maurice
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Nanomaterials
Subjects:
Cu-In nanoparticle
plasma treatment
silicon nanowire
PECVD
TEM
Online Access:https://www.mdpi.com/2079-4991/13/14/2061

Internet

https://www.mdpi.com/2079-4991/13/14/2061

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