The CNN Deep Learning-Based Melting Process Prediction of Czochralski Monocrystalline Silicon

To solve seeding failures due to the misjudgment caused by manual observation in the traditional melting process of Czochralski (CZ) monocrystalline silicon, a method for predicting the melting progress of CZ monocrystalline silicon based on Convolutional Neural Network (CNN) deep learning was propo...

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Bibliographic Details
Main Authors: Jing Zhang, Ding Liu, Qin-Wei Tang
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9758760/