Kinetic Monte Carlo model for homoepitaxial growth of Ga_{2}O_{3}
We developed a kinetic Monte Carlo (KMC) model for the homoepitaxy of β-Ga_{2}O_{3}. It comprises adsorption, diffusion, and desorption and reflects the structure of β-Ga_{2}O_{3} with its two kinds of atoms: Ga and O. The knowledge gained from metal organic vapour phase experiments (MOVPE) experime...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
American Physical Society
2020-07-01
|
| Series: | Physical Review Research |
| Online Access: | http://doi.org/10.1103/PhysRevResearch.2.033170 |