Controlled Deposition of Nanostructured Hierarchical TiO<sub>2</sub> Thin Films by Low Pressure Supersonic Plasma Jets

Controlled Deposition of Nanostructured Hierarchical TiO<sub>2</sub> Thin Films by Low Pressure Supersonic Plasma Jets

Plasma-assisted supersonic jet deposition (PA-SJD) is a precise technique for the fabrication of thin films with a desired nanostructured morphology. In this work, we used quadrupole mass spectrometry of the neutral species in the jet and the extensive characterization of TiO<sub>2</sub>...

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Bibliographic Details
Main Authors: Cecilia Piferi, Chiara Carra, Kateryna Bazaka, Hector Eduardo Roman, Elisa Camilla Dell’Orto, Vittorio Morandi, Igor Levchenko, Claudia Riccardi
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Nanomaterials
Subjects:
plasma
supersonic jet
deposition
nanostructures
TiO<sub>2</sub> film
Online Access:https://www.mdpi.com/2079-4991/12/3/533

Internet

https://www.mdpi.com/2079-4991/12/3/533

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