Precise Measurement of the Surface Shape of Silicon Wafer by Using a New Phase-Shifting Algorithm and Wavelength-Tuning Interferometer
In wavelength-tuning interferometry, the surface profile of the optical component is a key evaluation index. However, the systematic errors caused by the coupling error between the higher harmonics and phase shift error are considerable. In this research, a new 10<i>N</i> − 9 phase-shift...
| Main Authors: | , , |
|---|---|
| 格式: | 文件 |
| 语言: | English |
| 出版: |
MDPI AG
2020-05-01
|
| 丛编: | Applied Sciences |
| 主题: | |
| 在线阅读: | https://www.mdpi.com/2076-3417/10/9/3250 |