Properties of ScAlMgO<sub>4</sub> as Substrate for Nitride Semiconductors

SCAM has been expected to be a suitable substrate for GaN blue-light-emitting-diodes (LEDs) and high-power high electron mobility transistors (HEMTs) because of its lower lattice mismatch to GaN than that of the widely used sapphire. Considering both potential device applications, the crystal lattic...

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Main Authors: Takashi Matsuoka, Hitoshi Morioka, Satoshi Semboshi, Yukihiko Okada, Kazuya Yamamura, Shigeyuki Kuboya, Hiroshi Okamoto, Tsuguo Fukuda
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/13/3/449
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author Takashi Matsuoka
Hitoshi Morioka
Satoshi Semboshi
Yukihiko Okada
Kazuya Yamamura
Shigeyuki Kuboya
Hiroshi Okamoto
Tsuguo Fukuda
author_facet Takashi Matsuoka
Hitoshi Morioka
Satoshi Semboshi
Yukihiko Okada
Kazuya Yamamura
Shigeyuki Kuboya
Hiroshi Okamoto
Tsuguo Fukuda
author_sort Takashi Matsuoka
collection DOAJ
description SCAM has been expected to be a suitable substrate for GaN blue-light-emitting-diodes (LEDs) and high-power high electron mobility transistors (HEMTs) because of its lower lattice mismatch to GaN than that of the widely used sapphire. Considering both potential device applications, the crystal lattice and optical properties of SCAM substrates were investigated on selected high quality samples. As lattice parameters, the thermal expansion coefficient as well as the lattice constant were extrapolated from room temperature to 2000 °C by using a high temperature X-ray diffraction (XRD) system with the heating unit on a sample stage. The thermal conductance, which is also important for growing bulk SCAM crystals and the operation of devices on the SCAM substrate, was measured. Raman scattering measurements were carried out to better understand crystal lattice characteristics. It was clearly confirmed that prepared SCAM crystals were of high quality. Similar to sapphire, SCAM has the high transparency over the wide wavelength range from ultraviolet to mid-infrared. The refractive index, important for the design of any optical devices, was measured. From these results, it can be said that SCAM is a suitable substrate for nitride devices, especially LEDs and solar cells.
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spelling doaj.art-aea72186abb94bf49665e614cff2230a2023-11-17T10:28:56ZengMDPI AGCrystals2073-43522023-03-0113344910.3390/cryst13030449Properties of ScAlMgO<sub>4</sub> as Substrate for Nitride SemiconductorsTakashi Matsuoka0Hitoshi Morioka1Satoshi Semboshi2Yukihiko Okada3Kazuya Yamamura4Shigeyuki Kuboya5Hiroshi Okamoto6Tsuguo Fukuda7New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, JapanApplication Department, X-ray Division, Bruker Japan K.K., Yokohama 221-0022, JapanInstitute for Materials Research, Tohoku University, Sendai 980-8577, JapanDepartment of Electronics, Kyoto Institute of Technology, Kyoto 606-8585, JapanDepartment of Electronics, Kyoto Institute of Technology, Kyoto 606-8585, JapanInstitute for Materials Research, Tohoku University, Sendai 980-8577, JapanGraduate School of Science and Technology, Hirosaki University, Hirosaki 036-8224, JapanFukuda Crystal Laboratory, Sendai 989-3204, JapanSCAM has been expected to be a suitable substrate for GaN blue-light-emitting-diodes (LEDs) and high-power high electron mobility transistors (HEMTs) because of its lower lattice mismatch to GaN than that of the widely used sapphire. Considering both potential device applications, the crystal lattice and optical properties of SCAM substrates were investigated on selected high quality samples. As lattice parameters, the thermal expansion coefficient as well as the lattice constant were extrapolated from room temperature to 2000 °C by using a high temperature X-ray diffraction (XRD) system with the heating unit on a sample stage. The thermal conductance, which is also important for growing bulk SCAM crystals and the operation of devices on the SCAM substrate, was measured. Raman scattering measurements were carried out to better understand crystal lattice characteristics. It was clearly confirmed that prepared SCAM crystals were of high quality. Similar to sapphire, SCAM has the high transparency over the wide wavelength range from ultraviolet to mid-infrared. The refractive index, important for the design of any optical devices, was measured. From these results, it can be said that SCAM is a suitable substrate for nitride devices, especially LEDs and solar cells.https://www.mdpi.com/2073-4352/13/3/449ScAlMgO<sub>4</sub>SCAMGaNnitride semiconductorthermal expansion coefficienttransmittance
spellingShingle Takashi Matsuoka
Hitoshi Morioka
Satoshi Semboshi
Yukihiko Okada
Kazuya Yamamura
Shigeyuki Kuboya
Hiroshi Okamoto
Tsuguo Fukuda
Properties of ScAlMgO<sub>4</sub> as Substrate for Nitride Semiconductors
Crystals
ScAlMgO<sub>4</sub>
SCAM
GaN
nitride semiconductor
thermal expansion coefficient
transmittance
title Properties of ScAlMgO<sub>4</sub> as Substrate for Nitride Semiconductors
title_full Properties of ScAlMgO<sub>4</sub> as Substrate for Nitride Semiconductors
title_fullStr Properties of ScAlMgO<sub>4</sub> as Substrate for Nitride Semiconductors
title_full_unstemmed Properties of ScAlMgO<sub>4</sub> as Substrate for Nitride Semiconductors
title_short Properties of ScAlMgO<sub>4</sub> as Substrate for Nitride Semiconductors
title_sort properties of scalmgo sub 4 sub as substrate for nitride semiconductors
topic ScAlMgO<sub>4</sub>
SCAM
GaN
nitride semiconductor
thermal expansion coefficient
transmittance
url https://www.mdpi.com/2073-4352/13/3/449
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