Rapid prototyping of a polymer MEMS droplet dispenser by laser-assisted 3D printing

Rapid prototyping of a polymer MEMS droplet dispenser by laser-assisted 3D printing

Abstract In this work, we introduce a polymer version of a previously developed silicon MEMS drop deposition tool for surface functionalization that consists of a microcantilever integrating an open fluidic channel and a reservoir. The device is fabricated by laser stereolithography, which offers th...

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Bibliographic Details
Main Authors: Rémi Courson, Oleksii Bratash, Ali Maziz, Cloé Desmet, Ricardo Alvarado Meza, Loïc Leroy, Elodie Engel, Arnaud Buhot, Laurent Malaquin, Thierry Leïchlé
Format: Article
Language:English
Published: Nature Publishing Group 2023-07-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-023-00559-3

Internet

https://doi.org/10.1038/s41378-023-00559-3

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