Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition
A micro-probe based on laser trapping has been proposed for the probe system of a nano-coordinate measuring machine. This study focused on the “shadow effect,” which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was int...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2012-08-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/6/6_764/_pdf/-char/en |