Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition
A micro-probe based on laser trapping has been proposed for the probe system of a nano-coordinate measuring machine. This study focused on the “shadow effect,” which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was int...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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The Japan Society of Mechanical Engineers
2012-08-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/6/6_764/_pdf/-char/en |
| _version_ | 1818107826359238656 |
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| author | Masaki MICHIHATA Yasuhiro TAKAYA Terutake HAYASHI |
| author_facet | Masaki MICHIHATA Yasuhiro TAKAYA Terutake HAYASHI |
| author_sort | Masaki MICHIHATA |
| collection | DOAJ |
| description | A micro-probe based on laser trapping has been proposed for the probe system of a nano-coordinate measuring machine. This study focused on the “shadow effect,” which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve the shadow effect. As the result of increasing the trapping efficiency by 3.2 times, this high-efficient laser trapping made it possible to extend the measurable range of the vertical surface under the shadow effect. |
| first_indexed | 2024-12-11T02:05:38Z |
| format | Article |
| id | doaj.art-af17b2e7c5794204b783a60b6084c96e |
| institution | Directory Open Access Journal |
| issn | 1881-3054 |
| language | English |
| last_indexed | 2024-12-11T02:05:38Z |
| publishDate | 2012-08-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spelling | doaj.art-af17b2e7c5794204b783a60b6084c96e2022-12-22T01:24:23ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542012-08-016676477010.1299/jamdsm.6.764jamdsmImprovement of Laser Trapping Based Microprobe in Laser Shaded ConditionMasaki MICHIHATA0Yasuhiro TAKAYA1Terutake HAYASHI2Department of Mechanical Engineering, Osaka UniversityDepartment of Mechanical Engineering, Osaka UniversityDepartment of Mechanical Engineering, Osaka UniversityA micro-probe based on laser trapping has been proposed for the probe system of a nano-coordinate measuring machine. This study focused on the “shadow effect,” which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve the shadow effect. As the result of increasing the trapping efficiency by 3.2 times, this high-efficient laser trapping made it possible to extend the measurable range of the vertical surface under the shadow effect.https://www.jstage.jst.go.jp/article/jamdsm/6/6/6_764/_pdf/-char/enlaser trappingmicroproberadial polarizationcoordinate metrologyfinite difference time domain methodnano-cmm |
| spellingShingle | Masaki MICHIHATA Yasuhiro TAKAYA Terutake HAYASHI Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition Journal of Advanced Mechanical Design, Systems, and Manufacturing laser trapping microprobe radial polarization coordinate metrology finite difference time domain method nano-cmm |
| title | Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition |
| title_full | Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition |
| title_fullStr | Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition |
| title_full_unstemmed | Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition |
| title_short | Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition |
| title_sort | improvement of laser trapping based microprobe in laser shaded condition |
| topic | laser trapping microprobe radial polarization coordinate metrology finite difference time domain method nano-cmm |
| url | https://www.jstage.jst.go.jp/article/jamdsm/6/6/6_764/_pdf/-char/en |
| work_keys_str_mv | AT masakimichihata improvementoflasertrappingbasedmicroprobeinlasershadedcondition AT yasuhirotakaya improvementoflasertrappingbasedmicroprobeinlasershadedcondition AT terutakehayashi improvementoflasertrappingbasedmicroprobeinlasershadedcondition |