Multiaxis interferometric displacement measurement for local probe microscopy

Bibliographic Details
Main Authors:	Lazar Josef, Hrabina Jan, Šerý Mojmír, Klapetek Petr, Číp Ondřej
Format:	Article
Language:	English
Published:	De Gruyter 2012-02-01
Series:	Open Physics
Subjects:	interferometry nanometrology microscopy
Online Access:	https://doi.org/10.2478/s11534-011-0093-5

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