Multiaxis interferometric displacement measurement for local probe microscopy
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2012-02-01
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| Series: | Open Physics |
| Subjects: | |
| Online Access: | https://doi.org/10.2478/s11534-011-0093-5 |
| _version_ | 1819090392879988736 |
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| author | Lazar Josef Hrabina Jan Šerý Mojmír Klapetek Petr Číp Ondřej |
| author_facet | Lazar Josef Hrabina Jan Šerý Mojmír Klapetek Petr Číp Ondřej |
| author_sort | Lazar Josef |
| collection | DOAJ |
| first_indexed | 2024-12-21T22:23:06Z |
| format | Article |
| id | doaj.art-af318374e0774d4b92488dff579cda93 |
| institution | Directory Open Access Journal |
| issn | 2391-5471 |
| language | English |
| last_indexed | 2024-12-21T22:23:06Z |
| publishDate | 2012-02-01 |
| publisher | De Gruyter |
| record_format | Article |
| series | Open Physics |
| spelling | doaj.art-af318374e0774d4b92488dff579cda932022-12-21T18:48:17ZengDe GruyterOpen Physics2391-54712012-02-0110122523110.2478/s11534-011-0093-5Multiaxis interferometric displacement measurement for local probe microscopyLazar Josef0Hrabina Jan1Šerý Mojmír2Klapetek Petr3Číp Ondřej4Institute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech RepublicInstitute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech RepublicInstitute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech RepublicCzech Metrology Institute, Okružní 31, 638 00, Brno, Czech RepublicInstitute of Scientific Instruments, Královopolská 147, 612 64, Brno, Czech Republichttps://doi.org/10.2478/s11534-011-0093-5interferometrynanometrologymicroscopy |
| spellingShingle | Lazar Josef Hrabina Jan Šerý Mojmír Klapetek Petr Číp Ondřej Multiaxis interferometric displacement measurement for local probe microscopy Open Physics interferometry nanometrology microscopy |
| title | Multiaxis interferometric displacement measurement for local probe microscopy |
| title_full | Multiaxis interferometric displacement measurement for local probe microscopy |
| title_fullStr | Multiaxis interferometric displacement measurement for local probe microscopy |
| title_full_unstemmed | Multiaxis interferometric displacement measurement for local probe microscopy |
| title_short | Multiaxis interferometric displacement measurement for local probe microscopy |
| title_sort | multiaxis interferometric displacement measurement for local probe microscopy |
| topic | interferometry nanometrology microscopy |
| url | https://doi.org/10.2478/s11534-011-0093-5 |
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