Characteristics of phase delay in capacitive pick‐off circuits for MEMS resonators

Characteristics of phase delay in capacitive pick‐off circuits for MEMS resonators

In this Letter, the authors theoretically and experimentally investigate the characteristics of phase delay in capacitive pick‐off circuits for micro‐electromechanical systems (MEMS) resonators for the first time in history. An analytical model considering the phase delay for capacitive pick‐off cir...

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Bibliographic Details
Main Authors: Haibin Wu, Qiongxia Pang, Xudong Zheng, Zhipeng Ma, Yiyu Lin, Zhonghe Jin
Format: Article
Language:English
Published: Wiley 2019-04-01
Series:Electronics Letters
Subjects:
capacitive pick‐off circuits
microelectromechanical systems resonators
phase delay characteristics
MEMS resonators
analytical model
modified double side‐band demodulation configuration
Online Access:https://doi.org/10.1049/el.2019.0277

Internet

https://doi.org/10.1049/el.2019.0277

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