Process development for stabilization of vacuum arc plasma generation from a TiB2 cathode
Herein, we present stable and reproducible arc plasma generation from a TiB2 cathode. The process development contains three complimentary features: Use of a Mo cylinder around the TiB2 cathode improves arc ignition and stabilizes the process by keeping the arc spot at the cathode surface. The evolu...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-01-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5085713 |