Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Micro- and nanomechanical string resonators, which essentially are highly stressed bridges, are of particular interest for micro- and nanomechanical sensing because they exhibit resonant behavior with exceptionally high quality factors. Here, we fabricated and characterized nanomechanical pyrolytic...

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Bibliographic Details
Main Authors: Maksymilian Kurek, Frederik K. Larsen, Peter E. Larsen, Silvan Schmid, Anja Boisen, Stephan S. Keller
Format: Article
Language:English
Published: MDPI AG 2016-07-01
Series:Sensors
Subjects:
MEMS
resonators
pyrolysis
pyrolytic carbon
microfabrication
Online Access:http://www.mdpi.com/1424-8220/16/7/1097

Internet

http://www.mdpi.com/1424-8220/16/7/1097

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