Phase Composition and Thermoelectric Properties of Epitaxial CrMoVN Thin Films

Thin films of CrMoVN are deposited on c‐plane sapphire (Al2O3 (0001)) by direct current reactive magnetron sputtering, to investigate the effects of Mo and V addition to CrN‐based films. All films grow epitaxially, but Mo incorporation affects the crystal structure and nitrogen content. All films in...

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Bibliographic Details
Main Authors: Victor Hjort, Niraj Kumar Singh, Susmita Chowdhury, Rui Shu, Arnaud Le Febvrier, Per Eklund
Format: Article
Language:English
Published: Wiley-VCH 2023-12-01
Series:Advanced Energy & Sustainability Research
Subjects:
Online Access:https://doi.org/10.1002/aesr.202300119