Phase Composition and Thermoelectric Properties of Epitaxial CrMoVN Thin Films
Thin films of CrMoVN are deposited on c‐plane sapphire (Al2O3 (0001)) by direct current reactive magnetron sputtering, to investigate the effects of Mo and V addition to CrN‐based films. All films grow epitaxially, but Mo incorporation affects the crystal structure and nitrogen content. All films in...
Main Authors: | , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Wiley-VCH
2023-12-01
|
Series: | Advanced Energy & Sustainability Research |
Subjects: | |
Online Access: | https://doi.org/10.1002/aesr.202300119 |