The Pumping Performance of a Multiport Hybrid Molecular Pump and Its Effect on the Inspection Performance of a Helium Mass Spectrometer Leak Detector
The multiport hybrid molecular pump is a new type of molecular pump that was specifically designed for use in helium mass spectrometer leak detectors. This pump enables the instrument to detect both downstream and counter-current leaks. Access to different extraction ports can fulfill various leak d...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-06-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/13/6627 |