Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases

Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases

We present a new method to generate a neutral beam for surface treatment of materials by fast atoms of inert gases. The new method allows for treatment at lower pressures enlarging the scope for glow discharge applications. To generate the monoenergetic neutral beam, a grid composed of parallel plat...

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Bibliographic Details
Main Authors: Alexander Metel, Sergey Grigoriev, Marina Volosova, Yury Melnik, Enver Mustafaev
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Technologies
Subjects:
glow discharge
electron confinement
plasma homogeneity
charge-transfer collisions
accelerated ions
fast atoms
Online Access:https://www.mdpi.com/2227-7080/8/3/43

Internet

https://www.mdpi.com/2227-7080/8/3/43

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