Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases
We present a new method to generate a neutral beam for surface treatment of materials by fast atoms of inert gases. The new method allows for treatment at lower pressures enlarging the scope for glow discharge applications. To generate the monoenergetic neutral beam, a grid composed of parallel plat...
Main Authors: | Alexander Metel, Sergey Grigoriev, Marina Volosova, Yury Melnik, Enver Mustafaev |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-08-01
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Series: | Technologies |
Subjects: | |
Online Access: | https://www.mdpi.com/2227-7080/8/3/43 |
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