Structural optimization and flow field analysis of turbomolecular pump based on a new performance prediction algorithm

Abstract In the present study, a new turbomolecular pump (TMP) performance prediction algorithm is proposed according to the variable surface combined blade row (VSCBR) geometric model. The simulation calculation program is designed to perform structural optimization and flow field analysis. Researc...

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Bibliographic Details
Main Authors: Kun Sun, Haishun Deng, Cheng Wang, Shiwei Zhang
Format: Article
Language:English
Published: Nature Portfolio 2024-06-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-024-63690-9