Optical and Electrical Characterization of Visible Parylene Films

Poly-dichloro-para-xylylene (parylene-C) film is formed through a chemical vapor deposition process, where monomeric gases are polymerized on the target surface at room temperature and are used as transparent insulating coating films. The thin parylene-C films exhibit uniform conformal layers even w...

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Bibliographic Details
Main Authors: Ye-Seul Lee, Ji-Hyeon Yoon, Akeem Raji, Seung-Yo Baek, Yoonseuk Choi, Jonghee Lee, Akpeko Gasonoo, Jae-Hyun Lee
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/15/19/6717