Study of Electrostatic Actuator Voltage Reduction with a Tri-Electrode Actuator with Varying Pull-Down Voltage

Study of Electrostatic Actuator Voltage Reduction with a Tri-Electrode Actuator with Varying Pull-Down Voltage

Employing a tri-electrode topology for electrostatic actuators can significantly reduce needed control voltages. The tri-electrode topology employs a perforated intermediate electrode between the MEMS structure and pull-down electrode, and provides a low voltage control for the MEMS structure. Simul...

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Bibliographic Details
Main Authors: Yu Zhou, Cyrus Shafai, Lot Shafai, Greg Burley
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
electrostatic actuator
adaptive optics
finite element analysis
MEMS
tri-electrode topology
Online Access:https://www.mdpi.com/2504-3900/2/13/928

Internet

https://www.mdpi.com/2504-3900/2/13/928

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