Product process of carrier catalytic methane detection component based on MEMS technology
Based on analysis of carrier catalyst methane detecting principle, advanced microelectro mechanical system(MEMS) technology was proposed to improve product process of traditional carrier catalytic methane detection components and the specific product process was introduced. Performance of component...
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| Format: | Article |
| Language: | zho |
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Editorial Department of Industry and Mine Automation
2016-04-01
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| Series: | Gong-kuang zidonghua |
| Subjects: | |
| Online Access: | http://www.gkzdh.cn/article/doi/10.13272/j.issn.1671-251x.2016.04.011 |