An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films

An optical fiber sensor based on surface plasmon resonance (SPR) is proposed for monitoring the thickness of deposited nano-thin films. A side-polished multimode SPR optical fiber sensor with an 850 nm-LD is used as the transducing element for real-time monitoring of the deposited TiO2 thin films. T...

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Bibliographic Details
Main Authors: Wen-Ching Shih, Mu-Shiang Wu, Woo-Hu Tsai, Yu-Chia Tsao
Format: Article
Language:English
Published: MDPI AG 2013-07-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/13/7/9513