An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films
An optical fiber sensor based on surface plasmon resonance (SPR) is proposed for monitoring the thickness of deposited nano-thin films. A side-polished multimode SPR optical fiber sensor with an 850 nm-LD is used as the transducing element for real-time monitoring of the deposited TiO2 thin films. T...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2013-07-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/13/7/9513 |
| _version_ | 1828138951631699968 |
|---|---|
| author | Wen-Ching Shih Mu-Shiang Wu Woo-Hu Tsai Yu-Chia Tsao |
| author_facet | Wen-Ching Shih Mu-Shiang Wu Woo-Hu Tsai Yu-Chia Tsao |
| author_sort | Wen-Ching Shih |
| collection | DOAJ |
| description | An optical fiber sensor based on surface plasmon resonance (SPR) is proposed for monitoring the thickness of deposited nano-thin films. A side-polished multimode SPR optical fiber sensor with an 850 nm-LD is used as the transducing element for real-time monitoring of the deposited TiO2 thin films. The SPR optical fiber sensor was installed in the TiO2 sputtering system in order to measure the thickness of the deposited sample during TiO2 deposition. The SPR response declined in real-time in relation to the growth of the thickness of the TiO2 thin film. Our results show the same trend of the SPR response in real-time and in spectra taken before and after deposition. The SPR transmitted intensity changes by approximately 18.76% corresponding to 50 nm of deposited TiO2 thin film. We have shown that optical fiber sensors utilizing SPR have the potential for real-time monitoring of the SPR technology of nanometer film thickness. The compact size of the SPR fiber sensor enables it to be positioned inside the deposition chamber, and it could thus measure the film thickness directly in real-time. This technology also has potential application for monitoring the deposition of other materials. Moreover, in-situ real-time SPR optical fiber sensor technology is in inexpensive, disposable technique that has anti-interference properties, and the potential to enable on-line monitoring and monitoring of organic coatings. |
| first_indexed | 2024-04-11T18:45:32Z |
| format | Article |
| id | doaj.art-b156c082664b4edd80438a33e827d886 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T18:45:32Z |
| publishDate | 2013-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-b156c082664b4edd80438a33e827d8862022-12-22T04:08:51ZengMDPI AGSensors1424-82202013-07-011379513952110.3390/s130709513An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin FilmsWen-Ching ShihMu-Shiang WuWoo-Hu TsaiYu-Chia TsaoAn optical fiber sensor based on surface plasmon resonance (SPR) is proposed for monitoring the thickness of deposited nano-thin films. A side-polished multimode SPR optical fiber sensor with an 850 nm-LD is used as the transducing element for real-time monitoring of the deposited TiO2 thin films. The SPR optical fiber sensor was installed in the TiO2 sputtering system in order to measure the thickness of the deposited sample during TiO2 deposition. The SPR response declined in real-time in relation to the growth of the thickness of the TiO2 thin film. Our results show the same trend of the SPR response in real-time and in spectra taken before and after deposition. The SPR transmitted intensity changes by approximately 18.76% corresponding to 50 nm of deposited TiO2 thin film. We have shown that optical fiber sensors utilizing SPR have the potential for real-time monitoring of the SPR technology of nanometer film thickness. The compact size of the SPR fiber sensor enables it to be positioned inside the deposition chamber, and it could thus measure the film thickness directly in real-time. This technology also has potential application for monitoring the deposition of other materials. Moreover, in-situ real-time SPR optical fiber sensor technology is in inexpensive, disposable technique that has anti-interference properties, and the potential to enable on-line monitoring and monitoring of organic coatings.http://www.mdpi.com/1424-8220/13/7/9513surface plasmon resonanceoptical fiber sensor |
| spellingShingle | Wen-Ching Shih Mu-Shiang Wu Woo-Hu Tsai Yu-Chia Tsao An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films Sensors surface plasmon resonance optical fiber sensor |
| title | An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films |
| title_full | An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films |
| title_fullStr | An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films |
| title_full_unstemmed | An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films |
| title_short | An In-situ Real-Time Optical Fiber Sensor Based on Surface Plasmon Resonance for Monitoring the Growth of TiO2 Thin Films |
| title_sort | in situ real time optical fiber sensor based on surface plasmon resonance for monitoring the growth of tio2 thin films |
| topic | surface plasmon resonance optical fiber sensor |
| url | http://www.mdpi.com/1424-8220/13/7/9513 |
| work_keys_str_mv | AT wenchingshih aninsiturealtimeopticalfibersensorbasedonsurfaceplasmonresonanceformonitoringthegrowthoftio2thinfilms AT mushiangwu aninsiturealtimeopticalfibersensorbasedonsurfaceplasmonresonanceformonitoringthegrowthoftio2thinfilms AT woohutsai aninsiturealtimeopticalfibersensorbasedonsurfaceplasmonresonanceformonitoringthegrowthoftio2thinfilms AT yuchiatsao aninsiturealtimeopticalfibersensorbasedonsurfaceplasmonresonanceformonitoringthegrowthoftio2thinfilms AT wenchingshih insiturealtimeopticalfibersensorbasedonsurfaceplasmonresonanceformonitoringthegrowthoftio2thinfilms AT mushiangwu insiturealtimeopticalfibersensorbasedonsurfaceplasmonresonanceformonitoringthegrowthoftio2thinfilms AT woohutsai insiturealtimeopticalfibersensorbasedonsurfaceplasmonresonanceformonitoringthegrowthoftio2thinfilms AT yuchiatsao insiturealtimeopticalfibersensorbasedonsurfaceplasmonresonanceformonitoringthegrowthoftio2thinfilms |