Mn-Co-Ni-O thin films prepared by sputtering with alloy target
Abstract The thin film of heat-sensitive materials has been widely concerned with the current trend of miniaturization and integration of sensors. In this work, Mn1.56Co0.96Ni0.48O4 (MCNO) thin films were prepared on SiO2/Si substrates by sputtering with Mn–Co–Ni alloy target and then annealing in a...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Tsinghua University Press
2020-02-01
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| Series: | Journal of Advanced Ceramics |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s40145-019-0348-y |