Design of a High-Gain Hybrid Slot Antenna Array Based on Bulk Silicon MEMS Process for W-Band Applications
A W-band, high-gain, hybrid slot antenna array based on bulk silicon MEMS technology is proposed in this paper. The high-order-mode cavity is explored to excite the 2 × 2-slot basic unit, so as to reach the low-profile requirement of the bulk silicon MEMS process. To avoid the fragile structure of t...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Electronics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-9292/12/9/2028 |