Mathematically modeling of target speed effect on nonlinearity in DTLMI-based nano-metrology system
Jones matrix computation is one of the widely used methods in nonlinearitycalculation in laser interferometers. In this paper, the nonlinearity error in developedthree-longitudinal mode heterodyne interferometer (DTLMI) has been mathematicallymodeled at various speeds, by using Jones matrix calculat...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Islamic Azad University, Marvdasht Branch
2018-09-01
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Series: | Journal of Optoelectronical Nanostructures |
Subjects: | |
Online Access: | https://jopn.marvdasht.iau.ir/article_3042_cc5aac9160c572c5333a37088c5ebe61.pdf |