Femtosecond laser processing of fused silica: from process characterization to applications in optomechanics
Non-linear laser-matter interaction offers the possibility to structure dielectric materials in three dimensions. Among dielectrics, fused silica has brought particular attention because of its suitability for a variety of applications from optofluidics to integrated optics and from optical componen...
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2013-11-01
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Series: | MATEC Web of Conferences |
Online Access: | http://dx.doi.org/10.1051/matecconf/20130804004 |