Fabrication and Evaluation of Electret Condensor Microphone with Film Lamination and Silica Spacers
The electret condenser microphones (FilmECMs) with film lamination and silica agglomerates were fabricated and the influence of the silica agglomerates on the characteristic of the FilmECM was investigated. The silica agglomerates was formed on PFA (perfluoroalkoxy) films by the application of collo...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2013-09-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/7/4/7_655/_pdf/-char/en |