Investigation of physical and electrical properties of a suboxide layer at Si/Si-hexafluoride interface
Abstract The silicon suboxide SiOx (x < 2.0) offers promising industrial application possibilities ranging from electrodes in lithium-ion batteries, which are used widely in electrical vehicles and portable devices to sensing applications. Therefore, a low cost, environmental friendly and high pe...
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2024-06-01
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| Series: | Scientific Reports |
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| Online Access: | https://doi.org/10.1038/s41598-024-63377-1 |