Investigation of Side Wall Roughness Effect on Optical Losses in a Multimode Si<sub>3</sub>N<sub>4</sub> Waveguide Formed on a Quartz Substrate

Investigation of Side Wall Roughness Effect on Optical Losses in a Multimode Si<sub>3</sub>N<sub>4</sub> Waveguide Formed on a Quartz Substrate

This article presents the results of the study of the influence of the most significant parameters of the side wall roughness of an ultra-thin silicon nitride lightguide layer of multimode integrated optical waveguides with widths of 3 and 8 microns. The choice of the waveguide width was made due to...

Full description

Bibliographic Details
Main Authors: Anastasia Yakuhina, Alexey Kadochkin, Vyacheslav Svetukhin, Dmitry Gorelov, Sergey Generalov, Vladimir Amelichev
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Photonics
Subjects:
integrated optics
silicon technology
silicon nitride
photonics
reflectometry
attenuation
Online Access:https://www.mdpi.com/2304-6732/7/4/104

Internet

https://www.mdpi.com/2304-6732/7/4/104

Similar Items