A Micro Pump Driven by a Thin Film Permanent Magnet
A valveless micro pump, utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM), is presented. The micro pump consists of a diaphragm actuator, comprising a TFPM, 6µm in thickness and 3 mm in diameter, which is bonded to a membrane made of polydimethylsiloxane (PDMS) of about 80...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2012-11-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/7/6_1180/_pdf/-char/en |