A Micro Pump Driven by a Thin Film Permanent Magnet
A valveless micro pump, utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM), is presented. The micro pump consists of a diaphragm actuator, comprising a TFPM, 6µm in thickness and 3 mm in diameter, which is bonded to a membrane made of polydimethylsiloxane (PDMS) of about 80...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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The Japan Society of Mechanical Engineers
2012-11-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/7/6_1180/_pdf/-char/en |
| _version_ | 1818107887987195904 |
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| author | Chao ZHI Tadahiko SHINSHI Minoru UEHARA |
| author_facet | Chao ZHI Tadahiko SHINSHI Minoru UEHARA |
| author_sort | Chao ZHI |
| collection | DOAJ |
| description | A valveless micro pump, utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM), is presented. The micro pump consists of a diaphragm actuator, comprising a TFPM, 6µm in thickness and 3 mm in diameter, which is bonded to a membrane made of polydimethylsiloxane (PDMS) of about 80µm in thickness, together with a pump chamber and a pair of diffuser elements. TFPM is sputtered on a 50µm thick Nb sheet. The diffuser elements are used to generate a one-way fluid flow. The chamber is made of acryl plates. UV negative film resist is used to bond the different layers. Compared to sinusoidal driving signal with same amplitude, a square driving signal can generate a higher flow rate. Applying a square wave voltage, ±7.5V in amplitude, the pump flow rate attains 130µL/min at a frequency of 15Hz. The flow rate is highly dependent on frequency and driving signal type. Diaphragm displacement, pump frequency is measured and analyzed. |
| first_indexed | 2024-12-11T02:06:37Z |
| format | Article |
| id | doaj.art-b2b84e52f0444084902e828a10c4b1f5 |
| institution | Directory Open Access Journal |
| issn | 1881-3054 |
| language | English |
| last_indexed | 2024-12-11T02:06:37Z |
| publishDate | 2012-11-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spelling | doaj.art-b2b84e52f0444084902e828a10c4b1f52022-12-22T01:24:22ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542012-11-01671180118910.1299/jamdsm.6.1180jamdsmA Micro Pump Driven by a Thin Film Permanent MagnetChao ZHI0Tadahiko SHINSHI1Minoru UEHARA2Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of TechnologyInterdisciplinary Graduate School of Science and Engineering, Tokyo Institute of TechnologyMagnetic Materials Research Laboratory, Hitachi Metals, Ltd.A valveless micro pump, utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM), is presented. The micro pump consists of a diaphragm actuator, comprising a TFPM, 6µm in thickness and 3 mm in diameter, which is bonded to a membrane made of polydimethylsiloxane (PDMS) of about 80µm in thickness, together with a pump chamber and a pair of diffuser elements. TFPM is sputtered on a 50µm thick Nb sheet. The diffuser elements are used to generate a one-way fluid flow. The chamber is made of acryl plates. UV negative film resist is used to bond the different layers. Compared to sinusoidal driving signal with same amplitude, a square driving signal can generate a higher flow rate. Applying a square wave voltage, ±7.5V in amplitude, the pump flow rate attains 130µL/min at a frequency of 15Hz. The flow rate is highly dependent on frequency and driving signal type. Diaphragm displacement, pump frequency is measured and analyzed.https://www.jstage.jst.go.jp/article/jamdsm/6/7/6_1180/_pdf/-char/envalveless micro pumpthin film permanent magnetdiffuserelectromagnetic actuationsquare wave signal |
| spellingShingle | Chao ZHI Tadahiko SHINSHI Minoru UEHARA A Micro Pump Driven by a Thin Film Permanent Magnet Journal of Advanced Mechanical Design, Systems, and Manufacturing valveless micro pump thin film permanent magnet diffuser electromagnetic actuation square wave signal |
| title | A Micro Pump Driven by a Thin Film Permanent Magnet |
| title_full | A Micro Pump Driven by a Thin Film Permanent Magnet |
| title_fullStr | A Micro Pump Driven by a Thin Film Permanent Magnet |
| title_full_unstemmed | A Micro Pump Driven by a Thin Film Permanent Magnet |
| title_short | A Micro Pump Driven by a Thin Film Permanent Magnet |
| title_sort | micro pump driven by a thin film permanent magnet |
| topic | valveless micro pump thin film permanent magnet diffuser electromagnetic actuation square wave signal |
| url | https://www.jstage.jst.go.jp/article/jamdsm/6/7/6_1180/_pdf/-char/en |
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