Electrical actuation of single-crystal diamond MEMS resonators at high temperatures

Electrical actuation of single-crystal diamond MEMS resonators at high temperatures

Achieving efficient low-voltage actuation of microelectromechanical system (MEMS) resonators in high-temperature environments poses a difficult topic due to the thermal interference and the risk of high-temperature failure. In this work, the single-crystal diamond (SCD) resonators fabricated through...

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Bibliographic Details
Main Authors: Zilong Zhang, Keyun Gu, Guo Chen, Masataka Imura, Meiyong Liao
Format: Article
Language:English
Published: Taylor & Francis Group 2024-12-01
Series:Functional Diamond
Subjects:
single-crystal diamond
mems
actuation
high temperature
Online Access:http://dx.doi.org/10.1080/26941112.2024.2346085

Internet

http://dx.doi.org/10.1080/26941112.2024.2346085

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