Fabrication and characterization of NbTi microwave superconducting resonators

Fabrication and characterization of NbTi microwave superconducting resonators

Superconducting resonators are widely used in fields spanning from quantum computing to electron spin resonance (ESR) spectroscopy. With the goal of realizing superconducting resonators, a broad variety and combination of superconducting materials, substrates and fabrication processes have been used...

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Bibliographic Details
Main Authors: Roberto Russo, André Chatel, Nergiz Şahin Solmaz, Reza Farsi, Hernán Furci, Juergen Brugger, Giovanni Boero
Format: Article
Language:English
Published: Elsevier 2023-06-01
Series:Micro and Nano Engineering
Subjects:
Superconducting resonators
NbTi
Microfabrication
Direct photolitography
Ion beam etching
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007223000333

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http://www.sciencedirect.com/science/article/pii/S2590007223000333

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