Study of the Bonding Characteristics at β-Ga<sub>2</sub>O<sub>3</sub>(<span style="text-decoration: overline">2</span>01)/4H-SiC(0001) Interfaces from First Principles and Experiment
For the first time, β-Ga<sub>2</sub>O<sub>3</sub> were prepared on 4H-SiC (0001) substrates using a low-pressure chemical vapor deposition (LPCVD) technique. The obtained β-Ga<sub>2</sub>O<sub>3</sub>/4H-SiC heterostructures display strongly preferenti...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-01-01
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Series: | Crystals |
Subjects: | |
Online Access: | https://www.mdpi.com/2073-4352/13/2/160 |