Optimizing the refrigerants in ultra-low temperature Semiconductor processing chiller with mixed Refrigerant
Mixed refrigerant (MR) Cascade Refrigeration Systems are widely employed in industries requiring both extremely low temperatures and large cooling capacity, such as semiconductors and displays. The composition of the MR has a significant impact on the performance of the cascade refrigeration systems...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-09-01
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| Series: | Case Studies in Thermal Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214157X24008955 |