An ultrasound-induced wireless power supply based on AlN piezoelectric micromachined ultrasonic transducers

Abstract Wireless power transfer is one of the enabling technologies for powering implantable biomedical devices. Biocompatibility and CMOS compatibility of wireless power transfer devices are highly desired due to safety and footprint concerns. Toward implantable applications, this paper presents a...

Full description

Bibliographic Details
Main Authors: Zhicong Rong, Menglun Zhang, Yuan Ning, Wei Pang
Format: Article
Language:English
Published: Nature Portfolio 2022-09-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-022-19693-5