Semiconductor strain sensor for measuring biaxial strain field
We developed a semiconductor strain sensor chip for measuring the biaxial strain with high sensitivity and low power consumption. This sensor chip has two bridge circuits (sensors) that consist of an impurity diffusion layer on a silicon substrate, and are arranged perpendicularly to each other. Hig...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2019-08-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/85/877/85_19-00023/_pdf/-char/en |